Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13710696
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Filing Dt:
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12/11/2012
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Publication #:
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Pub Dt:
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05/02/2013
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Inventors:
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Masahiro SUENAGA, Koji TSUNEKAWA, Takeo KONNO
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Title:
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SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-5-1, KURIGI, ASAO-KU |
| KAWASAKI-SHI, JAPAN 215-8550 |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| 1290 AVENUE OF THE AMERICAS |
| NEW YORK, NY 10104 |
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