Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/03/2015
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Application #:
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13308989
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Filing Dt:
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12/01/2011
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Publication #:
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Pub Dt:
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05/16/2013
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Inventor:
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Eric Hudson
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Title:
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SYSTEM, METHOD AND APPARATUS OF A WEDGE-SHAPED PARALLEL PLATE PLASMA REACTOR FOR SUBSTRATE PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| MARTINE PENILLA GROUP, LLP |
| 710 LAKEWAY DRIVE, SUITE 200 |
| SUNNYVALE, CA 94085 |
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