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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
9436095
Issue Dt:
09/06/2016
Application #:
13682474
Filing Dt:
11/20/2012
Publication #:
20130120723
Pub Dt:
05/16/2013
Inventors:
Ulrich Wegmann, Joerg Mallmann, Ulrich Loering, Bernhard Kneer, Franz Sorg, Norbert Wabra et al
Title:
EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS
Assignment: 1
Reel/Frame:
029454/0565Recorded: 12/12/2012Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
EHRMANN, ALBRECHT
Exec Dt:
11/07/2006
WEGMANN, ULRICH
Exec Dt:
11/06/2006
HOCH, RAINER
Exec Dt:
11/13/2006
MALLMANN, JOERG
Exec Dt:
11/18/2006
SCHUSTER, KARL-HEINZ
Exec Dt:
11/10/2006
LOERING, ULRICH
Exec Dt:
11/14/2006
GRUNER, TORALF
Exec Dt:
11/08/2006
KNEER, BERNHARD
Exec Dt:
11/10/2006
GEUPPERT, BERNHARD
Exec Dt:
11/06/2006
SORG, FRANZ
Exec Dt:
11/10/2006
KUGLER, JENS
Exec Dt:
11/13/2006
WABRA, NORBERT
Exec Dt:
11/15/2006
Assignee:
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
SEAN P. DALEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
029486/0094Recorded: 12/17/2012Pages: 6
Conveyance:
A MODIFYING CONVERSION
Assignor:
CARL ZEISS SMT AG
Exec Dt:
10/14/2010
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
SEAN P. DALEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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