Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/28/2015
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Application #:
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13809990
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Filing Dt:
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02/18/2013
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Publication #:
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Pub Dt:
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06/06/2013
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Inventors:
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Tadahiro Ohmi, Masaki Hirayama
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Title:
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-1-1, KATAHIRA, AOBA-KU |
| SENDAI-SHI, MIYAGI, JAPAN 980-8577 |
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| PEARNE & GORDON LLP |
| 1801 EAST 9TH STREET |
| CLEVELAND, OH 44114 |
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