Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/17/2015
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Application #:
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13431836
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Filing Dt:
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03/27/2012
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Publication #:
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Pub Dt:
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06/20/2013
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Inventors:
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Akira Koshiishi, Peter L. G. Ventzek, Jun Shinagawa, John Patrick Holland
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Title:
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Semiconductor Processing System with Source for Decoupled Ion and Radical Control
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| KENNETH D. WRIGHT |
| 710 LAKEWAY DRIVE, SUITE 200 |
| SUNNYVALE, CA 94085 |
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