Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13784959
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Filing Dt:
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03/05/2013
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Publication #:
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Pub Dt:
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07/11/2013
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Inventors:
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John C. Arnold, Sean D. Burns, Matthew E. Colburn, Steven J. Holmes, Yunpeng Yin
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Title:
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TONE INVERSION WITH PARTIAL UNDERLAYER ETCH FOR SEMICONDUCTOR DEVICE FORMATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| CANTOR COLBURN LLP |
| 20 CHURCH STREET, 22ND FLOOR |
| HARTFORD, CT 06103 |
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