Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/30/2017
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Application #:
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13752659
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Filing Dt:
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01/29/2013
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Publication #:
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Pub Dt:
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08/01/2013
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Inventors:
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Makoto FUKUSHIMA, Keisuke NAMIKI, Shingo TOGASHI, Hozumi YASUDA, Osamu NABEYA et al
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Title:
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SUBSTRATE HOLDER, POLISHING APPARATUS, AND POLISHING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-1, HANEDA ASAHI-CHO, OHTA-KU |
| TOKYO, JAPAN |
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| ROTHWELL, FIGG, ERNST & MANBECK, P.C. |
| 607 14TH STREET, N.W. |
| SUITE 800 |
| WASHINGTON, DC 20005 |
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