Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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03/11/2014
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Application #:
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13656487
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Filing Dt:
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10/19/2012
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Publication #:
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Pub Dt:
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08/15/2013
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Inventors:
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Hanyou CHU, Peilin JIANG
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Title:
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NUMERICAL APERTURE INTEGRATION FOR OPTICAL CRITICAL DIMENSION (OCD) METROLOGY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME |
| MINATO-KU, JAPAN 107-6325 |
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| VANESSA L. YAZICIGIL |
| 1279 OAKMEAD PARKWAY |
| SUNNYVALE, CA 94085-4040 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| MARK C. VAN NESS |
| 1925 NW AMBERGLEN PARKWAY |
| SUITE 230 |
| BEAVERTON, OR 97006 |
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