Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13852850
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Filing Dt:
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03/28/2013
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Publication #:
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Pub Dt:
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10/03/2013
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Inventors:
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Garry Rose, Gildardo Delgado
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Title:
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SYSTEM AND METHOD FOR CLEANING SURFACES AND COMPONENTS OF MASK AND WAFER INSPECTION SYSTEMS BASED ON THE POSITIVE COLUMN OF A GLOW DISCHARGE PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| KLA-TENCOR CORPORATION AND DERGOSITS & N |
| THREE EMBARCADERO CENTER, SUITE 410 |
| SAN FRANCISCO, CA 94111 |
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