Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13378936
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Filing Dt:
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12/16/2011
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Publication #:
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Pub Dt:
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10/03/2013
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Inventors:
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Bai Yang, Wei Xia
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Title:
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METHOD FOR APPLYING POWER TO TARGET MATERIAL, POWER SUPPLY FOR TARGET MATERIAL, AND SEMICONDUCTOR PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8 WENCHANG AVENUE |
| BEIJING ECONOMIC-TECHNOLOGICAL DEVELOPMENT AREA |
| BEIJING, CHINA 100176 |
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| EDWARDS WILDMAN PALMER LLP |
| 525 OKEECHOBEE BLVD. |
| SUITE 1600 |
| WEST PALM BEACH, FL 33401 |
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