Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/08/2014
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Application #:
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13839753
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Filing Dt:
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03/15/2013
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Publication #:
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Pub Dt:
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10/03/2013
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Inventors:
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Hiroyuki KARIYA, Masaki Ishikawa, Yoshiaki Inda, Takeshi Kurose, Takanori Yagita et al
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Title:
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ION IMPLANTATION APPARATUS AND CONTROL METHOD THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, OSAKI 2-CHOME, SHINAGAWA-KU |
| TOKYO, JAPAN |
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| ARENT FOX LLP |
| 1717 K STREET, NW |
| WASHINGTON, DC 20036 |
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