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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
06/09/2015
Application #:
13439124
Filing Dt:
04/04/2012
Publication #:
Pub Dt:
10/10/2013
Inventors:
Chun-Lin CHANG, Chih-Hing HWANG, Wen-Yu KU, Chi-Ming YANG, Chin-Hsiang LIN
Title:
SYSTEM AND METHOD OF ION NEUTRALIZATION WITH MULTIPLE-ZONED PLASMA FLOOD GUN
Assignment: 1
Reel/Frame:
028318/0515Recorded: 06/05/2012Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
04/06/2012
Exec Dt:
04/11/2012
Exec Dt:
04/16/2012
Exec Dt:
04/17/2012
Exec Dt:
04/06/2012
Assignee:
NO. 8, LI-HSIN ROAD 6
SCIENCE-BASED INDUSTRIAL PARK
HSIN-CHU, TAIWAN 300-77
Correspondent:
DUANE MORRIS LLP (TSMC) IP DEPARTMENT
30 SOUTH 17TH STREET
PHILADELPHIA, PA 19103-4196

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