Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13447035
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Filing Dt:
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04/13/2012
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Publication #:
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Pub Dt:
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10/17/2013
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Inventors:
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Manoj Vellaikal, Michael S. Cox, Lin Zhang, Michael P. Stewart, Edward P. Hammond IV et al
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Title:
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STATIC DEPOSITION PROFILE MODULATION FOR LINEAR PLASMA SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON & SHERIDAN, LLP |
| 3040 POST OAK BOULEVARD, SUITE 1500 |
| HOUSTON, TX 77056 |
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