Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/14/2014
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Application #:
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13457832
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Filing Dt:
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04/27/2012
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Publication #:
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Pub Dt:
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10/31/2013
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Inventors:
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Yung-Yao Lee, Ying Ying Wang, Heng-Hsin Liu, Heng-Jen Lee
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Title:
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Tool Induced Shift Reduction Determination for Overlay Metrology
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6 |
| HSIN-CHU SCIENCE PARK |
| HSIN-CHU, TAIWAN 300-77 |
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| ESCHWEILER & ASSOCIATES, LLC NATIONAL CI |
| 629 EUCLID AVE., SUITE 1000 |
| CLEVELAND, OH 44114 |
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