Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/22/2015
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Application #:
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13981277
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Filing Dt:
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07/23/2013
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Publication #:
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Pub Dt:
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11/21/2013
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Inventors:
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Hiroaki Inoue, Yasushi Higuchi, Michio Ishikawa
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Title:
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RADICAL ETCHING APPARATUS AND METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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2500, HAGISONO, CHIGASAKI-SHI |
KANAGAWA, JAPAN 253-8543 |
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ARENT FOX LLP |
1717 K STREET, NW |
WASHINGTON, DC 20036 |
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05/10/2024 01:48 AM
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