Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13669164
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Filing Dt:
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11/05/2012
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Publication #:
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Pub Dt:
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11/21/2013
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Inventors:
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Soonam Park, Kimberly Hinkley, Qiwei Liang, Jang-Gyoo Yang
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Title:
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PRECURSOR DISTRIBUTION FEATURES FOR IMPROVED DEPOSITION UNIFORMITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| DANIEL K. MCCORMICK |
| TWO EMBARCADERO CENTER, EIGHTH FLOOR |
| KILPATRICK TOWNSEND & STOCKTON LLP |
| SAN FRANCISCO, CA 94111-3834 |
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