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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
06/30/2020
Application #:
13904315
Filing Dt:
05/29/2013
Publication #:
Pub Dt:
12/05/2013
Inventors:
Shinya Ishikawa, Shuichi Nagamine, Yoshihiro Kai, Yuji Kamikawa, Naoki Shindo
Title:
NOZZLE CLEANING DEVICE, NOZZLE CLEANING METHOD, AND SUBSTRATE PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
030503/0675Recorded: 05/29/2013Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/09/2013
Exec Dt:
05/09/2013
Exec Dt:
05/09/2013
Exec Dt:
05/09/2013
Exec Dt:
05/09/2013
Assignee:
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
PEARNE & GORDON LLP
1801 EAST 9TH STREET
SUITE 1200
CLEVELAND, OH 44114-3108

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