Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13486262
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Filing Dt:
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06/01/2012
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Publication #:
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Pub Dt:
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12/05/2013
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Inventors:
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Wenzhan Zhou, Moshe Preil, Zheng Zou
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Title:
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CO-OPTIMIZATION OF SCATTEROMETRY MARK DESIGN AND PROCESS MONITOR MARK DESIGN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 60 WOODLANDS INDUSTRIAL PARK D |
| STREET 2 |
| SINGAPORE, SINGAPORE 738406 |
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| DITTHAVONG MORI & STEINER, P.C. |
| 918 PRINCE STREET |
| ALEXANDRIA, VA 22314 |
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