Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/08/2015
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Application #:
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13837770
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Filing Dt:
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03/15/2013
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Publication #:
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Pub Dt:
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12/12/2013
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Inventors:
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Martin Lambert, Joachim Schulz
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Title:
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EUV EXCITATION LIGHT SOURCE WITH A LASER BEAM SOURCE AND A BEAM GUIDE DEVICE FOR MANIPULATING THE LASER BEAM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| JOHANN-MAUS-STRASSE 2 |
| DITZINGEN, GERMANY 71254 |
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| NATALIE K. GALLEY |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| JOHANN-MAUS-STRASSE 2 |
| DITZINGEN, GERMANY 71254 |
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| NATALIE K. GALLEY |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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