Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13977550
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Filing Dt:
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06/28/2013
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Publication #:
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Pub Dt:
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01/02/2014
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PCT #:
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US2011066493
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Inventors:
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Ruth A. Brain, Timothy E. Glassman, Nick Lindert, Joseph M. Steigerwald, Andre Baran
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Title:
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ATOMIC LAYER DEPOSITION (ALD) OF TAALC FOR CAPACITOR INTEGRATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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2200 MISSION COLLEGE BOULEVARD |
RNB-4-150 |
SANTA CLARA, CALIFORNIA 95052 |
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MAKI CHO |
1279 OAKMEAD PARKWAY |
SUNNYVALE, CA 94085 |
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