Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/05/2014
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Application #:
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13558284
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Filing Dt:
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07/25/2012
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Publication #:
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Pub Dt:
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01/30/2014
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Inventors:
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You-Hua Chou, Chih-Tsung Lee, Min-Hao Hong, Ming-Huei Lien, Chih-Jen Wu, Chen-Ming Huang
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Title:
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METHOD AND APPARATUS FOR PREPARING POLYSILAZANE ON A SEMICONDUCTOR WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK |
HSINCHU, TAIWAN 300-78 |
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MARK J. ITRI |
MCDERMOTT WILL & EMERY LLP |
600 13TH STREET, NW |
WASHINGTON, DC 20005-3096 |
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