Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14111085
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Filing Dt:
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10/10/2013
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Publication #:
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Pub Dt:
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02/27/2014
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Inventors:
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Hiroshi Yamabe, Hitoshi Obata, Katsuhiro Yamazoe, Yoshiki Nishijima, Kosuke Sakata et al
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Title:
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WAFER EXCHANGE APPARATUS AND WAFER SUPPORTING HAND
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6186 KINOKO-CHO, IBARA-SHI |
| OKAYAMA, JAPAN 715-8603 |
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| MARK D SARALINO |
| RENNER, OTTO, BOISSELLE & SKLAR, LLP |
| 1621 EUCLID AVENUE, NINETEENTH FLOOR |
| CLEVELAND, OH 44115 |
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