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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
9690879
Issue Dt:
06/27/2017
Application #:
14022860
Filing Dt:
09/10/2013
Publication #:
20140074277
Pub Dt:
03/13/2014
Inventors:
Susumu NISHIURA, Kaori INOSHIMA, Osamu MORITA, Hiroyuki MITSUI, Hiroshi EKKO et al
Title:
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND METHOD OF GENERATING RECIPE
Assignment: 1
Reel/Frame:
031180/0861Recorded: 09/11/2013Pages: 12
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
MITSUI, HIROYUKI
Exec Dt:
08/27/2013
NISHIURA, SUSUMU
Exec Dt:
08/27/2013
EKKO, HIROSHI
Exec Dt:
08/27/2013
INOSHIMA, KAORI
Exec Dt:
08/27/2013
NAKAYA, KAZUO
Exec Dt:
08/27/2013
MORITA, OSAMU
Exec Dt:
08/27/2013
Assignee:
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,
CHIYODA-KU
TOKYO, JAPAN 1018980
Correspondent:
VOLPE AND KOENIG, P.C.
30 SOUTH 17TH STREET
UNITED PLAZA
PHILADELPHIA, PA 19103
Assignment: 2
Reel/Frame:
047995/0490Recorded: 12/31/2018Pages: 18
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
HITACHI KOKUSAI ELECTRIC INC.
Exec Dt:
12/05/2018
Assignee:
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO
CHIYODA-KU
TOKYO, JAPAN 101-0045
Correspondent:
VOLPE & KOENIG, P.C.
30 SOUTH 17TH STREET
SUITE 1800
PHILADELPHIA, PA 19103

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