Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14080933
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Filing Dt:
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11/15/2013
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Publication #:
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Pub Dt:
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03/13/2014
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Inventors:
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Choongyeun Cho, Lawrence A. Clevenger, Laertis Economikos, Bernhard R. Liegl et al
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Title:
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METHODS TO PREDICT LITHOGRAPHY FOCUS ERROR USING CMP SIMULATED TOPOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| INTERNATIONAL BUSINESS MACHINES CORP |
| 2070 ROUTE 52, BLDG. 321 / ZIP 482 |
| HOPEWELL JCT., NY 12533 |
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