Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/07/2016
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Application #:
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13910249
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Filing Dt:
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06/05/2013
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Publication #:
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Pub Dt:
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03/20/2014
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Inventors:
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Yoshiya HAGIMOTO, Shinichiro SHIMOMURA, Hiroki SAKURAI, Yosuke KAWABUCHI et al
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Title:
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SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-7-1, KONAN |
| MINATO-KU, TOKYO-TO, JAPAN |
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| 3-1, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO-TO, JAPAN |
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| BURR & BROWN |
| PO BOX 7068 |
| SYRACUSE, NY 13261-7068 |
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