Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/02/2016
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Application #:
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14044659
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Filing Dt:
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10/02/2013
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Publication #:
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Pub Dt:
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04/03/2014
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Inventors:
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Osamu YOKOYAMA, Toshiaki FUJISATO, Takashi SAKUMA, Tatsuo HIRASAWA, Chiaki YASUMURO et al
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Title:
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PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| MURABITO, HAO & BARNES LLP |
| TWO N. MARKET STREET |
| THIRD FLOOR |
| SAN JOSE, CA 95113 |
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