Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/07/2019
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Application #:
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13649103
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Filing Dt:
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10/10/2012
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Publication #:
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Pub Dt:
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04/10/2014
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Inventors:
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Ali Shajii, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, Richard Gottscho et al
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Title:
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DISTRIBUTED MULTI-ZONE PLASMA SOURCE SYSTEMS, METHODS AND APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| MARTINE PENILLA GROUP, LLP |
| 710 LAKEWAY DRIVE |
| SUITE 200 |
| SUNNYVALE, CA 94085 |
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