Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13646471
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Filing Dt:
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10/05/2012
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Publication #:
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Pub Dt:
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04/10/2014
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Inventor:
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Naoto Tsuji
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Title:
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UV-Curing Apparatus Provided With Wavelength-Tuned Excimer Lamp and Method of Processing Semiconductor Substrate Using Same
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 8 |
| ALMERE, NETHERLANDS 1322 AP |
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| SNELL & WILMER L.L.P. / DAMON L. BOYD |
| ONE ARIZONA CENTER |
| 400 EAST VAN BUREN STREET |
| PHOENIX, AZ 85004 |
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