Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/19/2016
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Application #:
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14114737
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Filing Dt:
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01/09/2014
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Publication #:
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Pub Dt:
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04/24/2014
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Inventors:
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Gang Lei, Damon F. Kvamme
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Title:
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DEEP ULTRA-VIOLET LIGHT SOURCES FOR WAFER AND RETICLE INSPECTION SYSTEMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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KWAN & OLYNICK LLP |
2000 HEARST AVENUE, SUITE 305 |
BERKELEY, CA 94709 |
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