Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/01/2016
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Application #:
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13658630
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Filing Dt:
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10/23/2012
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Publication #:
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Pub Dt:
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04/24/2014
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Inventors:
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Irene Y. Su, Hua Song, James P. Shiely
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Title:
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MODELING AND CORRECTING SHORT-RANGE AND LONG-RANGE EFFECTS IN E-BEAM LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 700 E. MIDDLEFIELD ROAD |
| MOUNTAIN VIEW, CALIFORNIA 94043-4033 |
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| A. RICHARD PARK |
| PARK, VAUGHAN, FLEMING & DOWLER LLP |
| 2820 FIFTH STREET |
| DAVIS, CA 95618 |
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