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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
14127670
Filing Dt:
01/14/2014
Publication #:
Pub Dt:
05/08/2014
Inventors:
Ninad Shinde, Tatsuro Nagahara, Yusuke Takano
Title:
SILICON OXYNITRIDE FILM FORMATION METHOD AND SUBSTRATE EQUIPPED WITH SILICON OXYNITRIDE FILM FORMED THEREBY
Assignment: 1
Reel/Frame:
031962/0020Recorded: 01/14/2014Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/19/2013
Exec Dt:
12/18/2013
Exec Dt:
12/14/2013
Assignee:
70 MEISTER AVENUE
SOMERVILLE, NEW JERSEY 08876
Correspondent:
CLARK & ELBING LLP
101 FEDERAL STREET
15TH FLOOR
BOSTON, MA 02110

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