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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/16/2016
Application #:
14177421
Filing Dt:
02/11/2014
Publication #:
Pub Dt:
08/14/2014
Inventors:
Kazushi Kaneko, Naoki Matsumoto, Koji KOYAMA, Kazunori Funazaki, Hideo Kato et al
Title:
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND HIGH FREQUENCY GENERATOR
Assignment: 1
Reel/Frame:
032299/0667Recorded: 02/26/2014Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/17/2014
Exec Dt:
02/07/2014
Exec Dt:
02/07/2014
Exec Dt:
02/07/2014
Exec Dt:
02/07/2014
Exec Dt:
02/07/2014
Assignee:
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
PEARNE & GORDON, LLP
1801 EAST NINTH STREET
SUITE 1200
CLEVELAND, OH 44114

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