Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/22/2016
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Application #:
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14180107
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Filing Dt:
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02/13/2014
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Publication #:
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Pub Dt:
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09/04/2014
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Inventors:
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Oleg Khodykin, Alexander Bykanov, Daniel Christopher Wack
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Title:
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EUV LIGHT SOURCE USING CRYOGENIC DROPLET TARGETS IN MASK INSPECTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| ROBERT P. SIMPSON |
| 5555 MAIN STREET |
| SIMPSON & SIMPSON, PLLC |
| WILLIAMSVILLE, NY 14221 |
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