Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/21/2019
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Application #:
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13831456
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Filing Dt:
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03/14/2013
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Publication #:
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Pub Dt:
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09/04/2014
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Inventors:
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Pedro Vagos, Ye Feng, Daniel Thompson, Yan Zhang
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Title:
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CORRECTION OF ANGULAR ERROR OF PLANE-OF-INCIDENCE AZIMUTH OF OPTICAL METROLOGY DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1550 BUCKEYE DRIVE |
| MILPITAS, CALIFORNIA 95035-7418 |
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| SILICON VALLEY PATENT GROUP LLP |
| 4010 MOORPARK AVENUE |
| SUITE 210 |
| SAN JOSE, CA 95117 |
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Assignment:
2
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| 16 JONSPIN ROAD |
| WILMINGTON, MASSACHUSETTS 01887 |
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| ELENI ZACHARI |
| 184 SHEPHERDS BUSH RD |
| LONDON, W67NL UNITED KINGDOM |
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