Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/23/2015
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Application #:
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14283967
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Filing Dt:
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05/21/2014
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Publication #:
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Pub Dt:
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09/11/2014
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Inventors:
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Hiroyuki YASUDA, Katsuya TAKEMURA, Shohei TAGAMI
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Title:
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CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND PATTERN FORMING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-1, OHTEMACHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| BIRCH, STEWART, KOLASH & BIRCH, LLP |
| P.O. BOX 747 |
| FALLS CHURCH, VA 22040-0747 |
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