Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/30/2019
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Application #:
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14212899
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Filing Dt:
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03/14/2014
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Publication #:
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Pub Dt:
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09/18/2014
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Inventors:
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Masaaki FURUYA, Yuji NAGASHIMA, Masahiro ABE, Konosuke HAYASHI, Takashi OOTAGAKI et al
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Title:
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SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-1, KASAMA 2-CHOME, SAKAE-KU |
| YOKOHAMA-SHI, KANAGAWA, JAPAN |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| P.O. BOX 747 |
| FALLS CHURCH, VA 22040-0747 |
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