Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/07/2015
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Application #:
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13797460
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Filing Dt:
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03/12/2013
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Publication #:
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Pub Dt:
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09/18/2014
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Inventors:
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Shinya Kitano, Ming Zeng, Thomas Miu, Simon Jeyapalan, Avish A. Bharwani
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Title:
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METHOD OF WAFER SYSTEM INTERLOCK FOR THE PROTECTION OF EQUIPMENT AND PRODUCT IN SEMICONDUCTOR PROCESSING BRIDGE TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 28140 LAKEVIEW DRIVE |
| WIXOM, MICHIGAN 48393 |
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| ALLEMAN HALL MCCOY RUSSELL & TUTTLE LLP |
| 806 SW BROADWAY |
| SUITE 600 |
| PORTLAND, OR 97205-3335 |
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