Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/10/2017
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Application #:
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14038039
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Filing Dt:
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09/26/2013
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Publication #:
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Pub Dt:
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10/02/2014
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Inventors:
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Jae Yong Cho, Kevin Argabright, James E. LaRoche III, Mahmood Naim, David R. Hammerich et al
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Title:
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HEATED ELECTROSTATIC CHUCK AND SEMICONDUCTOR WAFER HEATER AND METHODS FOR MANUFACTURING SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 221 WARREN AVENUE |
| FREMONT, CALIFORNIA 94539 |
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| BURR & BROWN |
| PO BOX 7068 |
| SYRACUSE, NY 13261-7068 |
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