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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
14228483
Filing Dt:
03/28/2014
Publication #:
Pub Dt:
10/02/2014
Inventor:
Shouhong Tang
Title:
Wafer Shape and Thickness Measurement System Utilizing Shearing Interferometers
Assignment: 1
Reel/Frame:
032548/0861Recorded: 03/28/2014Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
03/26/2014
Assignee:
ONE TECHNOLOGY DRIVE
MILPITAS, CALIFORNIA 95035
Correspondent:
SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER
14301 FNB PARKWAY
SUITE 220
OMAHA, NE 68154-5299

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