Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/09/2016
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Application #:
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13901535
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Filing Dt:
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05/23/2013
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Publication #:
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Pub Dt:
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11/27/2014
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Inventors:
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Arthur Sato, Robert G. O'Neill, Eric Tonnis, Shang-I Chou, Seetharaman Ramachandran
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Title:
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System, Method and Apparatus for RF Power Compensation in Plasma Etch Chamber
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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MARTINE PENILLA GROUP, LLP |
710 LAKEWAY DRIVE |
SUITE 200 |
SUNNYVALE, CA 94085 |
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