Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/13/2016
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Application #:
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14373589
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Filing Dt:
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07/21/2014
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Publication #:
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Pub Dt:
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12/11/2014
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Inventors:
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Hiroyuki Miyashita, Yutaka Fujino, Taro Ikeda, Yuki Osada, Tomohito Komatsu
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Title:
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MICROWAVE EMISSION MECHANISM, MICROWAVE PLASMA SOURCE AND SURFACE WAVE PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| MURABITO HAO & BARNES LLP |
| 2 N. MARKET ST. |
| 3RD FL |
| SAN JOSE, CA 95113 |
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