Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/01/2015
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Application #:
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13915732
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Filing Dt:
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06/12/2013
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Publication #:
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Pub Dt:
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12/18/2014
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Inventors:
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Ryu Nakano, Naoki Inoue
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Title:
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Method For Controlling In-Plane Uniformity Of Substrate Processed By Plasma-Assisted Process
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 8 |
| ALMERE, NETHERLANDS 1322 AP |
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| SNELL & WILMER L.L.P. / DAMON L. BOYD |
| ONE ARIZONA CENTER |
| 400 EAST VAN BUREN STREET |
| PHOENIX, AZ 85004-2202 |
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