Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/18/2017
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Application #:
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13916827
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Filing Dt:
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06/13/2013
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Publication #:
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Pub Dt:
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12/18/2014
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Inventors:
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Che-Hao TU, William Weilun HONG, Chih-Yu CHANG, Ying-Tsung CHEN
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Title:
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MECHANISMS FOR FORMING OXIDE LAYER OVER EXPOSED POLYSILICON DURING A CHEMICAL MECHANICAL POLISHING (CMP) PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN ROAD. 6, SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN 300-77 |
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| BIRCH, STEWART, KOLASH & BIRCH, LLP |
| P.O. BOX 747 |
| FALLS CHURCH, VA 22040-0747 |
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