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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/08/2016
Application #:
14301835
Filing Dt:
06/11/2014
Publication #:
Pub Dt:
12/18/2014
Inventors:
BANQIU WU, AJAY KUMAR, RAO YALAMANCHILI, OMKARAM NALAMASU
Title:
METHODS FOR REDUCING LINE WIDTH ROUGHNESS AND/OR CRITICAL DIMENSION NONUNIFORMITY IN A PATTERNED PHOTORESIST LAYER
Assignment: 1
Reel/Frame:
033360/0204Recorded: 07/22/2014Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/18/2014
Exec Dt:
06/18/2014
Exec Dt:
06/30/2014
Exec Dt:
06/18/2014
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
MOSER TABOADA/ALAN TABOADA
1030 BROAD STREET
SUITE 203
SHREWSBURY, NJ 07702

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