Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/15/2019
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Application #:
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14251829
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Filing Dt:
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04/14/2014
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Publication #:
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Pub Dt:
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12/25/2014
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Inventors:
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Katsuhiko INABA, Shintaro KOBAYASHI, Toru MITSUNAGA
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Title:
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METHOD AND APPARATUS FOR MEASURING BOWING OF SINGLE-CRYSTAL SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-9-12, MATSUBARA-CHO |
| AKISHIMA-SHI, TOKYO, JAPAN 196-8666 |
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| BUCHANAN INGERSOLL & ROONEY |
| P.O. BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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