Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/30/2018
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Application #:
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14380705
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Filing Dt:
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08/22/2014
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Publication #:
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Pub Dt:
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01/08/2015
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Inventors:
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Jiro Matsuo, Toshio Seki, Takaaki Aoki, Kazuya Dobashi, Kensuke Inai, Misako Saito
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Title:
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SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING DEVICE, AND VACUUM PROCESSING DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| 36-1, YOSHIDA-HONMACHI, SAKYO-KU |
| KYOTO, JAPAN 606-8501 |
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| MURABITO, HAO & BARNES |
| TWO N. MARKET STREET |
| THIRD FLOOR |
| SAN JOSE, CA 95113 |
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