Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14305022
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Filing Dt:
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06/16/2014
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Publication #:
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Pub Dt:
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01/15/2015
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Inventors:
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Koji NAKANISHI, Masato ISHII, Toshiyuki NAKAGAWA, Tetsunori SASAYAMA
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Title:
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CHAMBER PRESSURE CONTROL APPARATUS FOR NEAR ATMOSPHERIC EPITAXIAL GROWTH SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| KEITH TACKETT |
| 24 GREENWAY PLAZA, SUITE 1600 |
| HOUSTON, TX 77046 |
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