Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14015557
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Filing Dt:
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08/30/2013
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Publication #:
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Pub Dt:
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03/05/2015
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Inventors:
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Srinivas D. NEMANI, Sean KANG, Jeremiah T. P. PENDER, Chia-Ling KAO et al
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Title:
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LOW TEMPERATURE PLASMA ANNEAL PROCESS FOR SUBLIMATIVE ETCH PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON + SHERIDAN, LLP |
| 595 SHREWSBURY AVENUE |
| SUITE 100 |
| SHREWSBURY, NJ 07702 |
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