Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/26/2016
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Application #:
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14025678
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Filing Dt:
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09/12/2013
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Publication #:
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Pub Dt:
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03/12/2015
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Inventors:
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Vincent Steffan Francischetti, Gregory J. Wilson, Kyle M. Hanson, Paul Wirth et al
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Title:
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ANNEAL MODULE FOR SEMICONDUCTOR WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PERKINS COIE LLP/SEMITOOL |
| PO BOX 1208 |
| SEATTLE, WA 98111-1208 |
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