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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
04/11/2017
Application #:
14543498
Filing Dt:
11/17/2014
Publication #:
Pub Dt:
03/12/2015
Inventors:
Hanying Feng, Yu Cao, Jun Ye
Title:
OPTIMIZATION OF SOURCE, MASK AND PROJECTION OPTICS
Assignment: 1
Reel/Frame:
034363/0081Recorded: 12/03/2014Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/15/2011
Exec Dt:
12/29/2011
Exec Dt:
12/18/2011
Assignee:
DE RUN 6501
VELDHOVEN, NETHERLANDS NL-5504 DR
Correspondent:
PILLSBURY WINTHROP SHAW PITTMAN, LLP
P.O. BOX 10500
MCLEAN, VA 22102

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